Quartz oscillator and method for manufacturing the same

Details Quartz oscillator and method for manufacturing the same Quartz oscillator and method for manufacturing the same

2006-06-06

2006-06-06

Wells, Kenneth B. (Department: 2816)

Oscillators

Electromechanical resonator

Crystal

C331S068000

Reexamination Certificate

active

07057470

ABSTRACT:
A quartz oscillator includes a base having a recessed portion provided on one face thereof by processing to have an inverse mesa shape, a quartz thin-film formed on the other face of the base by epitaxial growth to have a thickness of 10 μm or less, a vibrating reed portion, and excitation electrodes for mechanically supporting the quartz thin-film and for vibrating the vibrating reed portion.

REFERENCES:
patent: 3609593 (1971-09-01), Boll et al.
patent: 6245147 (2001-06-01), Kobayashi
patent: 9-102721 (1997-04-01), None
patent: 2004-40198 (2004-02-01), None
patent: 2004-48582 (2004-02-01), None

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