Quartz glass thermal sprayed parts and method for producing...

Details Quartz glass thermal sprayed parts and method for producing... Quartz glass thermal sprayed parts and method for producing...

2006-07-25

2006-07-25

McNeil, Jennifer (Department: 1775)

Stock material or miscellaneous articles

Structurally defined web or sheet

Including variation in thickness

C428S174000, C428S212000, C428S304400, C428S432000, C428S446000, C428S457000, C428S469000, C428S697000, C428S699000, C428S702000, C428S703000, C428S210000, C428S209000

Reexamination Certificate

active

07081290

ABSTRACT:
Parts, especially those formed of quartz glass, for film-forming devices, plasma-treating devices and the like have a problem of inner pollution of the devices with particles given by dropping of deposit films from the parts, a problem of hermetical sealing reduction due to bonding failure of the parts to other parts, and a problem of energy efficiency reduction due to the heat insulation failure in the parts. Parts having a thermal sprayed quartz glass film formed on a substrate have an increased ability to hold a deposit thereon, and have an increased ability to hermetically bond to other parts. The parts having a thermal sprayed black quartz glass film have an increased ability of heat insulation property. Even when washed with acid, the abilities of the parts do not lower. The parts can be used for a long period of time and their life is long.

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