Quantification of adsorbed molecular contaminant using thin...

Details Quantification of adsorbed molecular contaminant using thin... Quantification of adsorbed molecular contaminant using thin...

2008-05-06

2008-05-06

Tsai, Carol S. W. (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Chemical analysis

C702S170000, C438S014000, C438S514000, C073S432100

Reexamination Certificate

active

07369947

ABSTRACT:
A test method for measuring adsorbed molecular contamination uses a test structure that includes a substrate comprising a plurality of separated test sites having a plurality separate thicknesses having a base design thickness and a designed thickness interrelationship. The test structure is exposed to a molecular contaminant environment to provide an adsorbed molecular contaminant layer upon each of the plurality of separated test sites. The plurality of separated test sites with the adsorbed molecular contaminant layer thereon is measured. An appropriate algorithm that considers the designed thickness interrelationship is used to determine at least one of: (1) the base design thickness; and (2) a thickness of the adsorbed molecular contaminant layer.

REFERENCES:
patent: 6508990 (2003-01-01), Yoshida et al.
patent: 6809032 (2004-10-01), Mauersberger et al.
patent: 6835642 (2004-12-01), Yang et al.
patent: 7092077 (2006-08-01), Kishkovich et al.
patent: 7270886 (2007-09-01), Lee et al.
patent: 7319942 (2008-01-01), Hatfield et al.
patent: 2004/0224537 (2004-11-01), Lee et al.
patent: 2004/0259029 (2004-12-01), Nagahara et al.
patent: 2005/0114101 (2005-05-01), Hatfield et al.
patent: 2005/0183490 (2005-08-01), Grayfer et al.
patent: 2006/0093730 (2006-05-01), Phan et al.
patent: 2007/0215801 (2007-09-01), Walsh et al.
patent: 2007/0281498 (2007-12-01), Lee et al.

Affiliated with

Also associated with

Rating

Quantification of adsorbed molecular contaminant using thin... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Quantification of adsorbed molecular contaminant using thin..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Quantification of adsorbed molecular contaminant using thin... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2808203