Quality control system, quality control method, and method...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing

Reexamination Certificate

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C700S121000, C702S083000

Reexamination Certificate

active

07463941

ABSTRACT:
A quality control system has: a QC value storage unit, a data acquisition device, a device internal information storage unit, a recipe storage unit, a QC value prediction unit, a wafer determination unit, a recipe selection unit, and a measurement device.

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patent: 2005/0095774 (2005-05-01), Ushiku et al.
patent: 7-244694 (1995-09-01), None
Ushiku, Y. et al., “Method For Determining A Failure Of A Manufacturing Condition, System For Determining A Failure Of A Manufacturing Condition And Method For Manufacturing An Industrial Product,” U.S. Appl. No. 11/236,719, filed Sep. 28, 2005.

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