Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-04-03
2008-12-09
DeCady, Albert (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S121000, C702S083000
Reexamination Certificate
active
07463941
ABSTRACT:
A quality control system has: a QC value storage unit, a data acquisition device, a device internal information storage unit, a recipe storage unit, a QC value prediction unit, a wafer determination unit, a recipe selection unit, and a measurement device.
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Ino Tomomi
Ogawa Akira
Ushiku Yukihiro
DeCady Albert
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Garland Steven R
Kabushiki Kaisha Toshiba
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