4. Data processing: generic control systems or specific application
  5. Generic control system, apparatus or process
  6. Having operator control interface

Tomomi Ino

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Process-state management system, management server and...

Data processing: generic control systems or specific application – Generic control system – apparatus or process – Having operator control interface
Reexamination Certificate

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Quality control system, quality control method, and method...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Temperature measuring method and apparatus, measuring method...

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Temperature measuring method and apparatus, measuring method...

Semiconductor device manufacturing: process – With measuring or testing – Optical characteristic sensed
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