Radiant energy – Radiation tracer methods
Patent
1995-12-21
1997-07-22
Anderson, Bruce C.
Radiant energy
Radiation tracer methods
2504581, G01T 1161
Patent
active
056506198
ABSTRACT:
The present invention is a quality control method that denotes non-uniformities of structural features on a planarizing surface of a polishing pad across substantially the whole surface area of the pad. In one embodiment of the method, an indicating compound applied to the planarizing surface of a polishing pad adjoins to the structural feature on the planarizing surface of the pad in proportion to the density of the structural feature. Excess indicating compound is then removed from the planarizing surface of the pad to leave the portion of the indicating compound that adjoined to the structural feature in the pad. The indicating compound is readily visible, and thus non-uniform areas on the planarizing surface with a high density of the structural feature are stained a darker shade of color than other areas on the pad. The planarizing surface is subsequently evaluated to determine whether the surface area with an excess density of indicating compound is within a desired range.
REFERENCES:
patent: 2806959 (1957-09-01), Forest et al.
Anderson Bruce C.
Micro)n Technology, Inc.
LandOfFree
Quality control method for detecting defective polishing pads us does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Quality control method for detecting defective polishing pads us, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Quality control method for detecting defective polishing pads us will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1561302