Pyrolysis furnace having gas flowing path controller

Details Pyrolysis furnace having gas flowing path controller Pyrolysis furnace having gas flowing path controller

2005-09-06

2009-12-15

Wilson, Gregory A (Department: 3749)

Heating

Work chamber having heating means

Heating tube, element, or flue traverses work space

C432S202000, C432S228000, C432S224000, C422S129000

Reexamination Certificate

active

07632093

ABSTRACT:
Provided is a pyrolysis furnace having a gas flowing path controller with an improved structure. The pyrolysis furnace includes: a silicon substrate; a main body of the pyrolysis furnace; a heating unit that is formed around the main body and controls the temperature of the main body; at least one gas supplying tube through which a gas flows into the main body; and a gas flowing path controller that is installed inside the main body and controls the flow of the gas. As a result, controlling and manufacturing of small-sized nanoparticles with excellent characteristics is possible.

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Korean Office Action (with English translation) dated Apr. 24, 2006.

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