Pyroelectric thermal detector array

Details Pyroelectric thermal detector array Pyroelectric thermal detector array

1985-04-10

1986-06-10

Hearn, Brian E.

Metal working

Method of mechanical manufacture

Assembling or joining

29589, 29580, 148 15, 148DIG135, 357 55, 136201, 250338, 250332, 250349, H01L 3534, H01L 3700, G01J 510

Patent

active

045934568

ABSTRACT:
A thermal detector array includes a substrate layer with a pyroelectric layer attached to the substrate, a plurality of detector regions being defined in the pyroelectric layer by openings through the layer. An array of cavities in the substrate surface separates the detector regions from the surface. First and second electrodes are placed on opposite sides of each detector region or on a single side in a coplanar embodiment. The array is joined to a signal processing device by means of corresponding metallic contacts on the pyroelectric layer and the processing device.

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