Purge gas unit and purge gas supply integrated unit

Details Purge gas unit and purge gas supply integrated unit Purge gas unit and purge gas supply integrated unit

2011-01-25

2011-01-25

Fox, John (Department: 3753)

Fluid handling

Systems

With flow control means for branched passages

Reexamination Certificate

active

07874316

ABSTRACT:
To provide a purge gas unit and a purge gas supply integrated unit having a smaller foot space, the purge gas unit comprises an input block for input of purge gas into the purge gas unit, the input block including a purge passage formed through the input block to provide an opening in a side surface of the input block and an input passage formed branching off from the purge passage; an output block for output of the purge gas from the purge gas unit; a communication block connected to the input block and the output block to provide communication between the input block and the output block.

REFERENCES:
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patent: 6769463 (2004-08-01), Vu
patent: 2002/0017329 (2002-02-01), Fukushima
patent: 2003/0106597 (2003-06-01), Ichikawa et al.
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patent: A-2005-140259 (2005-06-01), None
patent: A-2006-002850 (2006-01-01), None
patent: A-2006-057645 (2006-03-01), None
patent: A-2006-132598 (2006-05-01), None
patent: 2002-0011331 (2002-02-01), None
patent: WO 02/093053 (2002-11-01), None

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