Puncture-resistant electrostatic chuck with flat surface and met

Details Puncture-resistant electrostatic chuck with flat surface and met Puncture-resistant electrostatic chuck with flat surface and met

1996-08-22

1998-01-13

Griffin, Jeffrey A.

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

279128, H02N 1300

Patent

active

057085579

ABSTRACT:
The invention includes a puncture-resistant electrostatic chuck with a flat surface and a method of making the same. The electrostatic chuck includes a conductive layer such as copper foil that is laminated to a first insulation layer such as a polyimide. A puncture-resistant layer is placed over the conductive layer and includes random or woven fibers held together by a resin. The puncture-resistant layer has an uneven topography on a top surface due to the fibers contained therein. A second insulation layer overlies the puncture-resistant layer and has a top surface which is substantially flat. The flat top surface of the second insulation layer is made by laminating layers together with a mandrel which is polished and free of irregularities such as pits, dents and high spots. Preferably the mandrel has a uniform thickness over its entire surface.

REFERENCES:
patent: 5284549 (1994-02-01), Barnes et al.
patent: 5315473 (1994-05-01), Collins et al.
patent: 5345999 (1994-09-01), Hosokawa
patent: 5348497 (1994-09-01), Nitescu
patent: 5350479 (1994-09-01), Collins et al.
patent: 5459632 (1995-10-01), Birang et al.
patent: 5486975 (1996-01-01), Shamouilian et al.
patent: 5491603 (1996-02-01), Birang et al.

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