Punching apparatus for backing-films of CMP machines and...

Details Punching apparatus for backing-films of CMP machines and... Punching apparatus for backing-films of CMP machines and...

2005-05-03

2005-05-03

Lund, Jeffrie R. (Department: 1763)

Cutting

Tool or tool with support

Cutting couple type

C083S620000, C083S651000, C083S687000, C083S691000, C156S345120, C156S345140

Reexamination Certificate

active

06886442

ABSTRACT:
An apparatus for punching CMP machine backing film. The apparatus comprises a base, a first plate, and a second plate. The base holds the backing-film. The first plate is disposed on the base in a manner such that it moves between a first position and a second position. The first plate abuts the backing-film when it is located at the second position. The second plate, having a plurality of punches, is disposed on the base in a manner such that it moves between a third position and a fourth position. The first plate is located at the first position when the second plate is located at the third position. The first plate is located at the second position when the second plate is located at the fourth position so that the punches pass through the first plate to punch the backing-film.

REFERENCES:
patent: 4235089 (1980-11-01), Vecchi
patent: 5303618 (1994-04-01), Norell
patent: 6006636 (1999-12-01), Baldwin et al.
patent: 6062120 (2000-05-01), Tsuzaki et al.
patent: 6119555 (2000-09-01), DiMaria
patent: 6220138 (2001-04-01), Sakamoto
patent: RE37323 (2001-08-01), Kawamura et al.
patent: 20030084997 (2003-05-01), Wu et al.
patent: 20040154452 (2004-08-01), Wu et al.
patent: 1300661 (2001-06-01), None
patent: 2451257 (2001-10-01), None

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