Pulsed operation of hall-current ion sources

Details Pulsed operation of hall-current ion sources Pulsed operation of hall-current ion sources

2005-03-22

2005-03-22

Lee, John R. (Department: 2881)

Radiant energy

Ion generation

Field ionization type

Reexamination Certificate

active

06870164

ABSTRACT:
In accordance with one specific embodiment of the present invention, a Hall-current ion source is operated in a pulsed mode where the pulse duration is short compared to the time for discharge fluctuations to develop. For a reduced loss of neutral gas, the time between pulses should be less than, or about equal to, the fill time for the ionizable gas in the discharge volume of the Hall-current ion source.

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patent: WO 9737127 (1997-10-01), None

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