Radiant energy – Inspection of solids or liquids by charged particles
Patent
1989-07-05
1990-11-06
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
250305, 250307, 250309, 250397, 250288, G01N 2300
Patent
active
049688880
ABSTRACT:
An apparatus and method for alternating voltage and for varying the rate of extraction during the extraction of secondary particles, resulting in periods when either positive ions, or negative ions and electrons are extracted at varying rates. Using voltage with alternating charge during successive periods to extract particles from materials which accumulate charge opposite that being extracted causes accumulation of surface charge of opposite sign. Charge accumulation can then be adjusted to a ratio which maintains a balance of positive and negative charge emission, thus maintaining the charge neutrality of the sample.
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Appelhans Anthony D.
Dahl David A.
Delmore James E.
Albrecht John M.
Berman Jack I.
Cordell Helen S.
Moser William R.
Nguyen Kiet T.
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