Pulsed field sample neutralization

Details Pulsed field sample neutralization Pulsed field sample neutralization

1989-07-05

1990-11-06

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

250305, 250307, 250309, 250397, 250288, G01N 2300

Patent

active

049688880

ABSTRACT:
An apparatus and method for alternating voltage and for varying the rate of extraction during the extraction of secondary particles, resulting in periods when either positive ions, or negative ions and electrons are extracted at varying rates. Using voltage with alternating charge during successive periods to extract particles from materials which accumulate charge opposite that being extracted causes accumulation of surface charge of opposite sign. Charge accumulation can then be adjusted to a ratio which maintains a balance of positive and negative charge emission, thus maintaining the charge neutrality of the sample.

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