Protective tape joining apparatus

Details Protective tape joining apparatus Protective tape joining apparatus

2011-08-02

2011-08-02

Nguyen, Khanh (Department: 1746)

Adhesive bonding and miscellaneous chemical manufacture

Surface bonding means and/or assembly means therefor

With cutting, punching, piercing, severing, or tearing

C156S510000

Reexamination Certificate

active

07987886

ABSTRACT:
A chuck table is configured with a table main body having a wafer placement part holding a wafer placed thereon, and an annular tape support frame provided outside the wafer placement part with a cutter blade traveling groove being interposed therebetween. The tape support frame has, at a top face thereof, a plurality of linear grooves arranged in parallel in a tape joining direction, a large number of linear tape support parts each located between the linear grooves, and an annular tape support part supporting the protective tape at an outer side of the cutter blade traveling groove.

REFERENCES:
patent: 5472554 (1995-12-01), Ko et al.
patent: 5688354 (1997-11-01), Ko et al.
patent: 2009/0151875 (2009-06-01), Nonaka et al.
patent: 2004-47976 (2004-02-01), None
patent: WO 2007049441 (2007-05-01), None

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