Protective shield around the inner edge of endpoint window in a

Details Protective shield around the inner edge of endpoint window in a Protective shield around the inner edge of endpoint window in a

1997-05-16

1998-12-22

Utech, Benjamin

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

118723MW, 118723ME, 31511121, C23F 102, C23C 1600

Patent

active

058513434

ABSTRACT:
The present invention provides a protective shield for a plasma etcher. The protective shield 40 protects the chamber wall 30 around the etch detect window from plasma etching and electrical arcing. The invention comprises a plasma etcher 10 has a wall 30 surrounding a chamber 14. The wall has an opening 16. The wall 30 having an inside face 30A and an outside face 30B. An opening edge 30C defines the opening 16. A window 24 covers over the opening 16 and over a portion of the outside face 30B of the wall. The protective shield 40 covers the opening edge 30C around the opening 16 and a portion of the inside face 30A of the wall 30 around the opening 16. The shield 40 is composed of an electrically insulating and plasma resistant material whereby the protective shield 40 prevents the chamber from arching and generating particles and extends the lifetime of the wall 30.

REFERENCES:
patent: 4952273 (1990-08-01), Popov
patent: 4954212 (1990-09-01), Gadriel et al.
patent: 5432315 (1995-07-01), Kaji et al.
patent: 5567268 (1996-10-01), Kadomura

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