Protective film-forming composition for immersion exposure...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

Reexamination Certificate

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C430S273100

Reexamination Certificate

active

07316886

ABSTRACT:
A protective film-forming composition for immersion exposure comprises a water-insoluble and alkali-soluble resin comprising a repeating unit derived from a monomer having an acid dissociation constant pKa of 8 or more.

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