Protective coating system for reflective optical elements,...

Details Protective coating system for reflective optical elements,... Protective coating system for reflective optical elements,...

2005-06-10

2009-12-08

Speer, Timothy M (Department: 1794)

Stock material or miscellaneous articles

Composite

Of metal

C428S698000, C428S701000, C428S702000

Reexamination Certificate

active

07629055

ABSTRACT:
A limiting factor in the operation of EUV lithographic devices is the lifetime or the reflectivity of the reflective optics that is reduced by contamination with carbon-containing substances. Protective coatings that are resistant to oxidation or are inert against water are already known.According to the invention it is proposed to deposit protective coatings on, for example, multilayers that suppress the growth of carbon-containing substances in combination with layers that are inert against residual gas atmosphere and energy input. Even with a long operating time a high reflectivity is thereby retained.The protective coatings may be deposited by electron-beam vaporization, magnetron- or ion-beam sputtering.

REFERENCES:
patent: 5958605 (1999-09-01), Montcalm et al.
patent: 6228512 (2001-05-01), Bajt et al.
patent: 6449086 (2002-09-01), Singh
patent: 6664554 (2003-12-01), Klebanoff et al.
patent: 6724462 (2004-04-01), Singh et al.
patent: 2002/0012797 (2002-01-01), Bijkerk et al.
patent: 2003/0008180 (2003-01-01), Bajt et al.
patent: 1 150 139 (2001-10-01), None
patent: WO 03/032329 (2003-04-01), None
XP008017154—Improved Reflectance and Stability of Mo/Si multilayers, S. Bajt, et al., SPIE vol. 4506 (2001) pp. 65-75.
XP-002219427—Capping layers for extreme-ultraviolet multilayer interference coatings, M. Singh, et al., Optics Letters, Mar. 1, 2001, vol. 26, No. 5, pp. 259-261.

Affiliated with

Also associated with

Rating

Protective coating system for reflective optical elements,... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Protective coating system for reflective optical elements,..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Protective coating system for reflective optical elements,... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4082914