Protection element and method of manufacturing same

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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257546, 257384, H01L 2906, H01L 2978, H01L 2702

Patent

active

052258963

ABSTRACT:
A semiconductor device comprises a semiconductor body (1) of silicon having a monolithic integrated circuit with a field oxide pattern (2) having at least one protection element (T2) having at least one active zone (4) of a first conductivity type, which adjoins at least in part the field oxide (2) and forms with the adjoining silicon region (5) of the second opposite conductivity type a pn junction (6). The active zone (4) is contacted with an electrode layer (7), which is connected to a point (G) of the semiconductor device to be protected against static discharge. The electrode layer (7) consists of a metal silicide. According to the invention, the metal silicide (7) also extends onto the field oxide (2) adjoining the active zone (4) over a certain distance, which is preferably at least 0.5 .mu.m.

REFERENCES:
patent: 4675073 (1987-06-01), Douglas
patent: 4697199 (1987-09-01), De Graaf et al.
patent: 4860086 (1989-08-01), Nakamura et al.
patent: 4874717 (1989-10-01), Neppl et al.
patent: 4927775 (1990-05-01), Alvarez et al.

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