Protecting metal conductors with sacrificial organic monolayers

Details Protecting metal conductors with sacrificial organic monolayers Protecting metal conductors with sacrificial organic monolayers

2005-06-14

2005-06-14

Trinh, Michael (Department: 2822)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S780000, C438S781000

Reexamination Certificate

active

06905958

ABSTRACT:
A structure and method for protecting exposed copper lines with chemisorbed, sacrificial, organic monolayers from further processing steps are herein described.

REFERENCES:
patent: 5236602 (1993-08-01), Jackson
patent: 6297169 (2001-10-01), Mangat et al.
patent: 6323131 (2001-11-01), Obeng et al.
patent: 6482733 (2002-11-01), Raaijmakers et al.
patent: 6482740 (2002-11-01), Soininen et al.
patent: 6518168 (2003-02-01), Clem et al.
Laibinis, Paul E., et al., “Comparison of the Structures and Wetting Properties of Self-Assembled Monolayers of n-Alkanethiols on the Coinage Metal Surfaces, Cu, Ag, Au,” Journal of the American Chemical Society, vol. 113, No. 19; Sep. 11, 1991, pp. 7152-7167.
Laibinis, Paul E., et al., “Self-Assembled Monolayers of n-Alkanethiolates on Copper are Barrier Films That Protect the Metal Against Oxidation by Air,” Journal of the American Chemical Society, vol. 114, 1992, pp. 9022-9028.

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