Projection type exposure apparatus

Photocopying – Projection printing and copying cameras – Focus or magnification control

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

35016216, 355 61, 356401, G03B 2752

Patent

active

044987625

ABSTRACT:
A projection type exposure apparatus has a projection objective lens, a projection negative having a predetermined shape pattern and an alignment mark, and a photosensitive plate having an alignment mark. The shape pattern of the projection negative is projected upon the photosensitive plate by the projection objective lens. Main illuminating optical means illuminates the projection negative with a first wavelength light to which the photosensitive plate is sensitive, and alignment optical means illuminates the projection negative with a second wavelength light to which the photosensitive plate is insensitive. The positional relation between the projection negative and the photosensitive plate is detected using the second wavelength light through the projection objective lens. One of the alignment mark on the projection negative and the alignment mark on the photosensitive plate has a zone pattern which forms a light-condensing point at a position spaced apart by a predetermined amount from the surface on which said one mark is formed, and said predetermined amount corresponds to the amount of chromatic aberration of the projection objective lens, at the side thereof adjacent to said zone pattern, for the second wavelength light relative to the first wavelength light.

REFERENCES:
patent: 4037969 (1977-07-01), Feldman et al.
patent: 4326805 (1982-04-01), Feldman et al.
patent: 4395117 (1983-07-01), Suzuki

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Projection type exposure apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Projection type exposure apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Projection type exposure apparatus will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1386976

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.