Projection optical system and method

Details Projection optical system and method Projection optical system and method

2007-11-27

2007-11-27

Sugarman, Scott J. (Department: 2873)

Optical: systems and elements

Lens

With field curvature shaping

C359S754000

Reexamination Certificate

active

11219594

ABSTRACT:
A refractive projection optical system for imaging a first object into a region of a second object comprises a plurality of lenses disposed along an imaging beam path of the projection optical system; wherein the projection optical system is configured to have a numerical aperture on a side of the second object of greater than 1 wherein the projection optical system is configured to generate an intermediate image of the first object and to image the intermediate image into the region of the second object, wherein the intermediate image is formed in between, the first and second objects.

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U.S. Appl. No. 60/526,096, filed Dec. 2, 2003, Rostalski et al.

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