Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-01-31
2006-01-31
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S067000, C501S054000, C359S350000, C359S833000, C065S017300, C065S017400, C065S030100, C430S311000
Reexamination Certificate
active
06992753
ABSTRACT:
Radiation-induced damage to a lens material in a projection exposure system is reduced by selection of maximum design fluence values HDfor lenses and at least one lens made of a material having a characteristic transition point TRCafter exposure to a given amount of radiation, wherein, for instance, TRC<0.8. HDamong other relationships and/or characteristics of the lenses.
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Eva Eric
Krähmer Daniel
Carl Zeiss SMT AG
Jones Day
Rutledge D.
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