Projection optical apparatus with focusing and alignment of reti

Details Projection optical apparatus with focusing and alignment of reti Projection optical apparatus with focusing and alignment of reti

1987-09-09

1989-05-09

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

250557, 356400, G01N 2186, G01B 1100

Patent

active

048291935

ABSTRACT:
An optical apparatus is provided with illuminating means provided on one side of an objective optical system having a pupil substantially at infinity, that is, telecentric, with a first object interposed therebetween for illuminating a first pattern on the first object, detecting means provided on the other side of the objective optical system with a second object interposed therebetween for outputting the information regarding the aligned state of the image of the first pattern by the objective optical system and a second pattern on the second object, light changing-over means provided at a position between the illuminating means and the detecting means and conjugate with the pupil for selectively changing over light passing through a plurality of substantially different areas on the pupil and directing the light to the detecting means, adjusting means for varying the length of the optical path between the first object and the second object, and control means for varying the length of the optical path by a predetermined amount by the adjusting means and effecting the change-over of the light changing-over means before and after the variation and effecting the positioning of the first object and the second object on the basis of the output information of the detecting means in each of these cases.

REFERENCES:
patent: 4395117 (1983-07-01), Suzuki
patent: 4642468 (1987-02-01), Tabata et al.

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