Optical: systems and elements – Lens – With field curvature shaping
Reexamination Certificate
2006-12-26
2006-12-26
Schwartz, Jordan M. (Department: 2873)
Optical: systems and elements
Lens
With field curvature shaping
C359S656000, C359S708000
Reexamination Certificate
active
07154678
ABSTRACT:
A projection objective has at least five lens groups (G1to G5) and has several lens surfaces. At least two aspheric lens surfaces are arranged so as to be mutually adjacent. These mutually adjacently arranged lens surfaces are characterized as a double asphere. This at least one double asphere (21) is mounted at a minimum distance from an image plane (0′) which is greater than the maximum lens diameter (D2) of the objective.
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“New Lenses for Microlithography”, by E. Glatzel, Zeiss-Inform., Oberkochen, 26, pp. 8 to 13 (1981/1982), No. 92 E.
Beierl Helmut
Schuster Karl-Heinz
Shafer David R.
Singer Wolfgang
Ulrich Wilhelm
Carl Zeiss Semiconductor Manufacturing Technologies AG
Ottesen Walter
Schwartz Jordan M.
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