Projection exposure system, beam delivery system and method...

Details Projection exposure system, beam delivery system and method... Projection exposure system, beam delivery system and method...

2011-08-09

2011-08-09

Mack, Ricky L (Department: 2873)

Optical: systems and elements

Single channel simultaneously to or from plural channels

By partial reflection at beam splitting or combining surface

Reexamination Certificate

active

07995280

ABSTRACT:
A beam delivery system of a projection exposure system comprises a laser generating a beam of laser light from a plurality of longitudinal laser modes in a cavity, wherein light generated by a single longitudinal laser mode has an average line width λlat, wherein the laser light of the beam has, at each of respective lateral positions of the beam, a second line width λlatcorresponding to lateral laser modes, and wherein the laser light of the beam has, when averaged over a whole cross section thereof, a line width λbcorresponding to plural lateral laser modes, and wherein λm<λlat<λb, and wherein an optical delay apparatus disposed in the beam provides an optical path difference Δl, wherein0.8·λ02(2·Δ⁢⁢λl)<Δ⁢⁢l<1.8·λ02(2·Δ⁢⁢λl),wherein λ0is an average wavelength of the light of the first beam of laser light, and Δλlatrepresents the second line width.

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