4. Photocopying
  5. Projection printing and copying cameras
  6. Illumination systems or details

Vladimir Davydenko

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Illumination system for a microlithographic projection...

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Illumination system for use in imaging systems

Optical: systems and elements – Single channel simultaneously to or from plural channels – By surface composed of lenticular elements
Reexamination Certificate

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Projection exposure system, beam delivery system and method...

Optical: systems and elements – Single channel simultaneously to or from plural channels – By partial reflection at beam splitting or combining surface
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2273014

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