Projection exposure system

Details Projection exposure system Projection exposure system

1993-10-20

1996-04-02

Sugarman, Scott J.

Optical: systems and elements

Lens

With reflecting element

359619, G02B 1700, G02B 2710

Patent

active

055046274

ABSTRACT:
A projection exposure system includes a light transmitting member located between a light source and fly's eye lens to receive most of the incident light and to transmit the incident light to the periphery of the fly's eye lens. Light transmission of the system may be carried out by a light pipe and conic reflection mirror concentrically placed therein, or by an optical fiber flux having a light entrance pupil consisting of a bundle of individual units and a ramified light exit pupil. The system has high light-utilizing efficiency and reduced exposure time because most of the incident light is used.

REFERENCES:
patent: 5365374 (1994-11-01), Nishikawa et al.
patent: 5547526 (1970-12-01), Devereux

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