Optical: systems and elements – Lens – With reflecting element
Patent
1993-10-20
1996-04-02
Sugarman, Scott J.
Optical: systems and elements
Lens
With reflecting element
359619, G02B 1700, G02B 2710
Patent
active
055046274
ABSTRACT:
A projection exposure system includes a light transmitting member located between a light source and fly's eye lens to receive most of the incident light and to transmit the incident light to the periphery of the fly's eye lens. Light transmission of the system may be carried out by a light pipe and conic reflection mirror concentrically placed therein, or by an optical fiber flux having a light entrance pupil consisting of a bundle of individual units and a ramified light exit pupil. The system has high light-utilizing efficiency and reduced exposure time because most of the incident light is used.
REFERENCES:
patent: 5365374 (1994-11-01), Nishikawa et al.
patent: 5547526 (1970-12-01), Devereux
Kang Ho-young
Kim Hak
Samsung Electronics Co,. Ltd.
Sugarman Scott J.
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