Projection exposure machine comprising a projection lens

Details Projection exposure machine comprising a projection lens Projection exposure machine comprising a projection lens

2007-04-10

2007-04-10

Sugarman, Scott J. (Department: 2873)

Optical: systems and elements

Lens

With field curvature shaping

C359S739000, C355S067000

Reexamination Certificate

active

10915972

ABSTRACT:
A projection exposure machine comprises a projection lens with a lens arrangement and at least one stop. The lens arrangement comprises a group of optical elements which is arranged between the stop and the image plane. An optical element of the group situated close to the image plane has a thickness of at least 6.5% of the entire stop diameter.

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