Projection exposure apparatus correcting tilt of telecentricity

Details Projection exposure apparatus correcting tilt of telecentricity Projection exposure apparatus correcting tilt of telecentricity

1996-05-17

1998-04-14

Moses, R. L.

Photocopying

Projection printing and copying cameras

Step and repeat

355 55, 355 67, G03B 2742, G03B 2752, G03B 2754

Patent

active

057398992

ABSTRACT:
A projection exposure apparatus wherein a pattern formed on a mask is projected onto a substrate through a projection optical system. The apparatus has an illumination optical system for illuminating the mask by exposure light, and a first adjusting member which is disposed in the illumination optical system to change telecentricity on the substrate. The apparatus further has a second adjusting member for adjusting at least one of the position of the substrate in the direction of an optical axis of the projection optical system and the tilt of the substrate, and a control system for controlling the first and second adjusting members. The control system locally corrects the position of a spatial image formed by the projection optical system.

REFERENCES:
patent: 5194893 (1993-03-01), Nishi
patent: 5309198 (1994-05-01), Nakagawa
patent: 5408083 (1995-04-01), Hirukawa
patent: 5448336 (1995-09-01), Shiraishi
patent: 5581324 (1996-12-01), Miyai et al.
patent: 5591958 (1997-01-01), Nishi et al.
patent: 5596204 (1997-01-01), Irie et al.

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