Projection exposure apparatus

Details Projection exposure apparatus Projection exposure apparatus

1995-01-25

1995-12-19

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Step and repeat

355 50, G03B 2742, G03B 2748, G03B 2750

Patent

active

054773040

ABSTRACT:
Constant speed drive of a reticle and a wafer in a relative scanning direction and positioning of the reticle and the wafer are simultaneously performed with high precision by a slit scanning exposure scheme. A reticle side scanning stage for scanning a reticle relative to a slit-like illumination area in the relative scanning direction is placed on a reticle side base. A reticle side fine adjustment stage for moving and rotating the reticle within a two-dimensional plane is placed on the reticle side scanning stage. The reticle is placed on the reticle side fine adjustment stage. Constant speed drive and positioning of the reticle and a wafer are performed by independently controlling the reticle side scanning stage and the reticle side fine adjustment stage.

REFERENCES:
patent: 3538828 (1970-11-01), Genovese
patent: 4747678 (1988-05-01), Shafer et al.
patent: 4924257 (1990-05-01), Jain
patent: 5004348 (1991-04-01), Magome
patent: 5227839 (1993-07-01), Allen

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