Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1997-05-09
1999-07-06
Rutledge, D.
Photocopying
Projection printing and copying cameras
Step and repeat
355 67, 356400, 250548, G03B 2742, G01B 1100
Patent
active
059203781
ABSTRACT:
A projection exposure apparatus includes off-axis type plate alignment systems which make it possible to reduce alignment time and thereby increase throughput. Exposure of large photosensitive plates is made possible without increasing the length of the plate stage stroke. Multiple fiducial mark members including fiducial mark members in different positions on a plate stage are utilized. Multiple off-axis type plate alignment systems are used to observe the multiple fiducial marks.
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Hamada Tomohide
Mori Susumu
Murakami Masaichi
Saiki Kazuaki
Shirasu Hiroshi
Nikon Corporation
Rutledge D.
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