Projection exposure apparatus

Details Projection exposure apparatus Projection exposure apparatus

1989-12-15

1990-10-23

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Distortion introducing or rectifying

355 53, G03B 2768

Patent

active

049656309

ABSTRACT:
The present invention provides a projection exposure apparatus comprising: a reticle stage; an illumination optical system for illuminating a reticle on the reticle stage; a stage on which a substrate is supported; and a projection optical system having a predetermined numerical aperture to project a pattern formed on the reticle and illuminated by the illumination optical system onto the substrate, and in which a longitudinal spherial aberration thereof regarding the focusing of the pattern formed on the reticle onto the substrate are excessively corrected.

REFERENCES:
patent: 3655260 (1972-04-01), Bartucci et al.
patent: 3980405 (1976-09-01), Tatsuno et al.

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