4. Photocopying
  5. Projection printing and copying cameras
  6. Distortion introducing or rectifying

Toshiyuki Namikawa

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Projection exposure apparatus

Photocopying – Projection printing and copying cameras – Distortion introducing or rectifying
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Proximity-type microlithography apparatus and method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Profile ID: LFUS-PAI-P-980320

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