Programmable electrical interlock system for a vacuum processing

Details Programmable electrical interlock system for a vacuum processing Programmable electrical interlock system for a vacuum processing

1997-07-11

2000-07-11

Bueker, Richard

Coating apparatus

Interfacing control of plural operations

118719, 36446828, C23C 1600, G05B 1900

Patent

active

060866764

ABSTRACT:
A vacuum processing system is provided with a programmable interlock circuit for combining the interlock signals generated by the system into combined interlock signals. The programmable interlock circuit uses a matrix of switches to select which interlocks will be combined to form which combinations. The interlock signals are formed by two lines that are shorted together when the interlock signal is okay and not shorted together when the interlock signal is not okay. When the two lines are shorted together, then they activate a relay to send a signal in a line of relays, each of which is activated by a different interlock signal. The matrix of switches short out the relay switches in order to deselect one interlock input for one interlock output. Each interlock signal is associated with an LED for visual indication of whether the interlock is okay. Likewise, each combined interlock signal is associated with an LED for visual indication of whether the combination of interlocks is okay. Additionally, each interlock signal is associated with a defeat circuit wherein a jumper may defeat the interlock signal for every combination. Each defeat circuit is provided with an LED for visual indication of whether the interlock is defeated.

REFERENCES:
patent: 5525024 (1996-06-01), Freerks et al.
patent: 5551165 (1996-09-01), Turner et al.
Europe International Search Report Dated Nov. 11, 1998.

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