Profilometry through dispersive medium using collimated...

Details Profilometry through dispersive medium using collimated... Profilometry through dispersive medium using collimated...

2008-05-20

2008-05-20

Connolly, Patrick (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

11003538

ABSTRACT:
A collimated light is used in combination with a compensation element and an aberration-corrected objective with a long working distance to produce a greatly improved fringe contrast in the measurement of a sample surface through a dispersive element. When the dispersive element consists of a fixed cover with substantially consistent characteristics from sample to sample, the compensation element is a plate that matches the optical characteristics of the dispersive element. When the dispersive element varies, the compensation element consists of a variable-thickness transmissive element embodied in a pair of half-cube prisms is adapted to slide along the beam-splitting plane, thereby permitting the adjustment of the optical path-length through the splitter in the reference-beam direction while retaining unchanged the optical path-length in the test-beam direction.

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“Pellicle.” The American Heritage Dictionary of the English Language, 4th ed. Boston: Houghton Mifflin, 2000. www.barleby.com/61/. Jun. 5, 2007. A thin skin or film, such as an organic membrane or liquic film.

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