Electric resistance heating devices – Heating devices – Radiant heater
Patent
1995-10-20
1998-08-04
Jeffery, John A.
Electric resistance heating devices
Heating devices
Radiant heater
219290, 219411, 118725, 427557, H01L 2126
Patent
active
057907501
ABSTRACT:
An apparatus and method for thermal processing, and more particularly for rapid thermal processing wherein a first thermal radiator generates and projects a first pattern of thermal radiation onto a first surface of a substrate, and wherein a second thermal radiator generates and projects a second pattern of thermal radiation onto a second surface of the substrate. The temperatures on the first and second surfaces are sensed by temperature sensors. A mechanism for selectively controlling the first and second thermal radiators in response to the temperature sensors causes a prescribed temperature profile to be produced within the substrate.
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Applied Materials Inc.
Jeffery John A.
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