Production of stable, non-thermal atmospheric pressure rf...

Details Production of stable, non-thermal atmospheric pressure rf... Production of stable, non-thermal atmospheric pressure rf...

2005-06-21

2005-06-21

Tran, Thuy Vinh (Department: 2821)

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

C445S016000

Reexamination Certificate

active

06909237

ABSTRACT:
The present invention enables the production of stable, steady state, non-thermal atmospheric pressure rf capacitive α-mode plasmas using gases other than helium and neon. In particular, the current invention generates and maintains stable, steady-state, non-thermal atmospheric pressure rf α-mode plasmas using pure argon or argon with reactive gas mixtures, pure oxygen or air. By replacing rare and expensive helium with more readily available gases, this invention makes it more economical to use atmospheric pressure rf α-mode plasmas for various materials processing applications.

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