Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1985-05-21
1987-03-03
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
29569L, 29580, 29591, 156646, 156649, 156652, 156655, 1566591, 156662, 357 30, 357 56, H01L 21306, B44C 122, C03C 1500, C03C 2506
Patent
active
046473394
ABSTRACT:
Onto the surface of an initial semiconductor structure 1, 2, 3, 4 is deposited a layer of an organic material 5 having a window 9. Layers 6', 7', and 8' are deposited on the exposed surface of the semiconductor, of which 8' is an ion-beam resisting material. Corresponding layers 6, 7, and 8 are deposited on the organic material. The organic material is then lifted off together with layers 6, 7, and 8. Ion-beam milling of the semiconductor material to either side of 8' followed by removal of any remnant of 8' results in a structure having an elevated semiconductor portion carrying an electrode 6', 7'.
Preferred materials are gallium arsenide for layers 1 and 3, gallium aluminium arsenides for layers 2 and 4, titanium for layers 6' and 8', and gold for layer 7'.
The invention can be applied to the production of rib waveguide electrooptic devices, including phase modulators.
REFERENCES:
patent: 4213805 (1980-07-01), Tsukada
patent: 4341010 (1982-07-01), Tijburg et al.
Soviet Journal of Quantum Electronics, vol. 10, No. 1, Jan. 1980, pp. 60-63, American Institute of Physics, New York, US; Yu A. Bykovskii et al: Electrooptic radiation modulators utilizing semiconductor ridged waveguides, p. 60, col. 2, lines 13-21.
IEEE Journal of Quantum Electronics, vol. QE-18, No. 4, Apr. 1982, pp. 795-800, IEEE, New York, US; M. W. Austin: "GaAs/GaAlAs Curved Rib Waveguides", p. 796, col. 2, lines 20-30.
Le Vide, Les Couches Minces, vol. 35, No. 204, Nov./Dec. 1980, pp. 317-336, Paris, FR; D. Dieumegard: "Purverisation et Technologies d'Erosion Ionique", p. 324, lines 1-15, FIG. 16.
Electronics Letters, vol. 20, No. 7, Mar. 29, 1984, pp. 295-297, London, GB: P. Buchmann et al: "Reactive Ion Etched GaAs Optical Waveguide Modulators, With Low Loss and High Speed", p. 296, lines 4-7.
British Telecommunications
Powell William A.
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