Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1994-11-29
1996-02-27
Nguyen, Nam
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
20419212, 20429819, C23C 1434
Patent
active
054945585
ABSTRACT:
A process and system for producing fullerenes by sputtering. A carbon target is sputtered to form a vapor of sputtered carbon atoms. The sputtered carbon atoms are quenched in an atmosphere of inert gas and deposited onto a collection substrate. The resulting carbon soot is extracted to recover fullerenes. The process produces carbon soot which is rich in C.sub.70 and higher fullerenes.
REFERENCES:
patent: 4565618 (1986-01-01), Banks
patent: 4872905 (1989-10-01), Bourne et al.
patent: 5071708 (1991-12-01), Komaki et al.
Bunshah Rointan F.
Doerr Hans J.
Jou Shyankay
Prakash Shiva
Nguyen Nam
The Regents of the University of California
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