Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making named article
Reexamination Certificate
2011-06-07
2011-06-07
Angebranndt, Martin J (Department: 1722)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making named article
C430S320000, C264S001330
Reexamination Certificate
active
07955786
ABSTRACT:
Provided is a light transmissive stamper having light transmissivity with respect to an ultraviolet ray and durability for repeated use. Specifically, on a light transmissive substrate, a light transmissive auxiliary layer and an inorganic resist layer are formed sequentially, and a light beam is selectively irradiated to the inorganic resist layer, to thereby modify an inorganic resist ranging from a surface of the inorganic resist layer to a surface of the light transmissive auxiliary layer. Then, a part modified by the light beam or an unmodified part is selectively removed until the light transmissive auxiliary layer is exposed, thereby forming an uneven pattern corresponding to an information pattern in the inorganic resist layer.
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Angebranndt Martin J
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
LandOfFree
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