Production method of semiconductor device

Details Production method of semiconductor device Production method of semiconductor device

2006-02-21

2006-02-21

Everhart, Caridad (Department: 2891)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S687000, C438S643000

Reexamination Certificate

active

07001841

ABSTRACT:
After a thin first conductive film is formed on a barrier film having a crystal structure, a second conductive film is formed on the first conductive film. Thereafter, the first conductive film and the second conductive film are heated such that the first and second conductive films are integrated to form a third conductive film.

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