Production method of a thin film device, production method...

Details Production method of a thin film device, production method... Production method of a thin film device, production method...

2006-10-10

2006-10-10

Lindsay, Jr., Walter L. (Department: 2812)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

On insulating substrate or layer

C438S622000, C438S678000

Reexamination Certificate

active

07118943

ABSTRACT:
In this production method of a thin film device, a thin film is formed by discharging a liquid material from a nozzle in a deposition chamber to coat the liquid material onto a substrate. The substrate is then subjected to heat treatment by a first heat treatment unit and a second heat treatment unit, thereby improving the crystallinity and fitness of the film as well as its adhesion with other films.

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