Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2008-01-22
2008-01-22
Paladini, Albert W. (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
Reexamination Certificate
active
11005330
ABSTRACT:
A production managing system for semiconductor devices includes, in a semiconductor producing center C, production devices11a-11cfor producing semiconductor devices, in-line measuring devices12a-12cfor measuring data of a lot, a database2storing data of production methods, the measured data, the specifications of the process steps corresponding to the measured data, the estimated yield, the data of lot input date and hour, the data of the scheduled date on which the process step is performed, the data of actual date of completion in every step and the data of the scheduled date of completion of the semiconductor devices of every lot, correspondingly to a lot number data of the semiconductor devices (chips) and a server1including an estimated yield operating unit1afor calculating the estimated yield, which is a final yield, on the basis of the specifications and the measured data, and a production managing unit1bfor performing a production management of semiconductor devices ordered by a user on the basis of the respective data inputted by the user and the estimated yield, wherein a user terminal of the user not only performs a determination whether or not the process processing in every process is normal but also estimates the final number of normal products ordered by the user and obtainable finally.
REFERENCES:
patent: 3614608 (1971-10-01), Giedd
patent: 4571685 (1986-02-01), Kamoshida
patent: 4949162 (1990-08-01), Tamaki et al.
patent: 4988877 (1991-01-01), Stokowksi et al.
patent: 5001536 (1991-03-01), Fukuzawa et al.
patent: 5089774 (1992-02-01), Nakano
patent: 5132507 (1992-07-01), Nakano
patent: 5280176 (1994-01-01), Jach et al.
patent: 5327012 (1994-07-01), Yano et al.
patent: 5365034 (1994-11-01), Kawamura et al.
patent: 5412210 (1995-05-01), Todokoro et al.
patent: 5453994 (1995-09-01), Kawamoto et al.
patent: 5493236 (1996-02-01), Ishii et al.
patent: 5637186 (1997-06-01), Liu et al.
patent: 5757198 (1998-05-01), Shida et al.
patent: 5780870 (1998-07-01), Maeda et al.
patent: 5815002 (1998-09-01), Nikawa
patent: 5900645 (1999-05-01), Yamada
patent: 5903011 (1999-05-01), Hatanaka
patent: 5989919 (1999-11-01), Aoki
patent: 6037588 (2000-03-01), Liu et al.
patent: 6055463 (2000-04-01), Cheong et al.
patent: 6127193 (2000-10-01), Bang et al.
patent: 6294919 (2001-09-01), Baumgart
patent: 6314379 (2001-11-01), Hu et al.
patent: 6317514 (2001-11-01), Reinhorn et al.
patent: 6338001 (2002-01-01), Steffan et al.
patent: 6407386 (2002-06-01), Dotan et al.
patent: 6542830 (2003-04-01), Mizuno et al.
patent: 6711453 (2004-03-01), Yamada et al.
patent: 50-63990 (1975-05-01), None
patent: 57-6310 (1982-01-01), None
patent: 62-19707 (1987-01-01), None
patent: 63-9807 (1988-01-01), None
patent: 03-205573 (1991-09-01), None
patent: 04-062857 (1992-02-01), None
patent: 06-273297 (1994-09-01), None
patent: 07-066172 (1995-03-01), None
patent: 08-005528 (1996-01-01), None
patent: 08-313244 (1996-11-01), None
patent: 09-061142 (1997-03-01), None
patent: 10-281746 (1998-10-01), None
patent: 10-300450 (1998-11-01), None
patent: 11-026343 (1999-01-01), None
patent: 2000-124276 (2000-04-01), None
patent: 2000-164715 (2000-06-01), None
patent: 2000-174077 (2000-06-01), None
patent: 2000-180143 (2000-06-01), None
“An In-Line Contact and Via Hole Inspection Method Using Electron Beam Compensation Current”, Yamada et al., IEEE 1999, available from http://www.fabsol.com/us/images/library/21.pdf.
Itagaki Yousuke
Tsujide Tohru
Ushiki Takeo
Yamada Keizo
Fab Solutions, Inc.
Paladini Albert W.
Steinberg Neil A.
LandOfFree
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