Production managing system of semiconductor device

Details Production managing system of semiconductor device Production managing system of semiconductor device

2005-01-11

2005-01-11

Paladini, Albert W. (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S108000, C438S014000

Reexamination Certificate

active

06842663

ABSTRACT:
A production managing system for semiconductor devices includes, in a semiconductor producing center C, production devices11a-11cfor producing semiconductor devices, in-line measuring devices12a-12cfor measuring data of a lot, a database2storing data of production methods, the measured data, the specifications of the process steps corresponding to the measured data, the estimated yield, the data of lot input date and hour, the data of the scheduled date on which the process step is performed, the data of actual date of completion in every step and the data of the scheduled date of completion of the semiconductor devices of every lot, correspondingly to a lot number data of the semiconductor devices (chips) and a server1including an estimated yield operating unit1afor calculating the estimated yield, which is a final yield, on the basis of the specifications and the measured data, and a production managing unit1bfor performing a production management of semiconductor devices ordered by a user on the basis of the respective data inputted by the user and the estimated yield, wherein a user terminal of the user not only performs a determination whether or not the process processing in every process is normal but also estimates the final number of normal products ordered by the user and obtainable finally.

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