Processing system

Details Processing system Processing system

1998-06-05

2000-10-17

Mathews, Alan A.

Photocopying

Projection printing and copying cameras

With developing

355 30, 396611, G03B 2732, G03B 2752, G03D 500

Patent

active

061339814

ABSTRACT:
A processing system includes a coating/developing station for performing either a solution processing for processing a substrate using solution or a thermal processing for thermally processing the substrate, and a transfer unit for transferring the substrate into and from the coating/developing station. A casing encases the coating/developing station and the transfer unit. An interface section, provided in the casing, transfers the substrate into and from an external exposure machine for exposing the resist on the substrate. A pressure setting device sets a pressure in the casing to be lower than a pressure in the external exposure machine.

REFERENCES:
patent: 5240556 (1993-08-01), Ishikawa et al.
patent: 5565034 (1996-10-01), Nanbu et al.
patent: 5651823 (1997-07-01), Parodi et al.
patent: 5686143 (1997-11-01), Matsukawa et al.
patent: 5725664 (1998-03-01), Nanbu et al.
patent: 5766824 (1998-06-01), Batchelder et al.
patent: 5871587 (1999-02-01), Hasegawa et al.
patent: 5876280 (1999-03-01), Kitano et al.

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