Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent
1993-08-20
1994-10-18
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
25049221, H01J 3720
Patent
active
053571150
ABSTRACT:
Load lock chambers having a function of detecting positional deviation of wafers are provided in a process chamber of an ion injection apparatus, two on a carrying-in side, and two on a carrying-out side. One load lock chamber on the carrying-in side and one on the carrying-out side are used as a standby. Carrying-in and carrying-out members are outside of the process chamber. Two transfer members are in the process chamber. A dummy wafer stage is formed at a position which can be accessed by the transfer members. Wafers are transferred from load stages by the carrying-in member via the load lock chambers to the process chamber through a double operation line. Loading a wafer on the turn table and unloading a wafer therefrom can be performed simultaneously by operations of the transfer members and. The wafers are similarly carried out of the apparatus in a double operation line. At this time, dummy wafers in the process chamber can be used, if necessary.
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Asakawa Teruo
Hosaka Noboru
Osawa Tetsu
Anderson Bruce C.
Tokyo Electron Limited
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