Processing method and apparatus

Details Processing method and apparatus Processing method and apparatus

1991-07-24

1993-04-20

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156345, 20429809, 20429815, 20429835, 20429838, H01L 21306, B44C 122, B29C 3700, C23C 1400

Patent

active

052039587

ABSTRACT:
A processing method includes the steps of placing an object to be processed on a susceptor arranged in a hermetic container, preliminarily introducing a small amount of heat transfer medium gas to a gap between the object to be processed and the susceptor while evacuating the gap, introducing the heat transfer medium gas to the gap until a pressure thereof reaches a predetermined value while controlling the pressure thereof by controlling an evacuation amount from the gap, and processing the object to be processed.

REFERENCES:
patent: 4771730 (1988-09-01), Tezuka
patent: 4832781 (1989-05-01), Mears
patent: 4931135 (1990-06-01), Horiuchi et al.
patent: 5078851 (1992-06-01), Nishihata et al.

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