Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
Reexamination Certificate
2006-04-11
2006-04-11
Zervigon, Rudy (Department: 1763)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
Having glow discharge electrode gas energizing means
C156S345440, C156S345450, C156S345460, C156S345540, C156S345550, C118S7230AN, C118S718000, C118S719000, C118S7230ER, C118S730000
Reexamination Certificate
active
07025856
ABSTRACT:
Apparatus for the processing of materials involving placing a material either placed between an radio-frequency electrode and a ground electrode, or which is itself one of the electrodes. This is done in atmospheric pressure conditions. The apparatus effectively etches or cleans substrates, such as silicon wafers, or provides cleaning of spools and drums, and uses a gas containing an inert gas and a chemically reactive gas.
REFERENCES:
patent: 3959104 (1976-05-01), Fales
patent: 5053246 (1991-10-01), Shuttleworth et al.
patent: 5180433 (1993-01-01), Okuda et al.
patent: 5224441 (1993-07-01), Felts et al.
patent: 5258074 (1993-11-01), Okuda et al.
patent: 5364481 (1994-11-01), Sasaki et al.
patent: 5464667 (1995-11-01), Köhler et al.
patent: 5595792 (1997-01-01), Kashiwaya et al.
patent: 5743966 (1998-04-01), Woolley et al.
patent: 5961772 (1999-10-01), Selwyn et al.
patent: 6044792 (2000-04-01), Ogawa et al.
patent: 6054018 (2000-04-01), Denes et al.
patent: 6290806 (2001-09-01), Donohoe
patent: 6367411 (2002-04-01), Ogawa et al.
Henins Ivars
Herrmann Hans W.
Park Jae-young
Selwyn Gary S.
Fitzgerald Mark N.
The Regents of the University of California
Wyrick Milton D.
Zervigon Rudy
LandOfFree
Processing materials inside an atmospheric-pressure... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Processing materials inside an atmospheric-pressure..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Processing materials inside an atmospheric-pressure... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3556283