Processing apparatus of processing wafer sheets

Details Processing apparatus of processing wafer sheets Processing apparatus of processing wafer sheets

1997-06-17

1999-10-05

Bennett, Henry A.

Drying and gas or vapor contact with solids

Apparatus

With automatic control

34 58, 34186, F26B 1310

Patent

active

059605626

ABSTRACT:
A processing apparatus of the invention includes a rotary processing part for rotating and drying plural sheets of objects to be processed collectively in order to allow the object to be rotated immediately after they are accommodated in the rotary processing part and a balance adjusting mechanism for adjusting balance of the rotary processing part by moving counterweights in accordance with the number of the objects. Further the processing apparatus further includes a counter for counting the number of the objects accommodated in the rotary processing part and a control unit for controlling the balance adjusting operation of the balance adjusting mechanism in accordance with a predetermined relationship between the number of objects and the respective positions of the counterweights.

REFERENCES:
patent: 5469634 (1995-11-01), Mezaki
patent: 5667535 (1997-09-01), Kasahara
patent: 5692313 (1997-12-01), Ikeda et al.

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