Processing apparatus having integrated pumping system

Details Processing apparatus having integrated pumping system Processing apparatus having integrated pumping system

2006-05-30

2006-05-30

Rivell, John (Department: 3753)

Fluid handling

Systems

With pump

C137S565300, C137S565330, C118S715000, C118S719000

Reexamination Certificate

active

07051759

ABSTRACT:
An apparatus115for processing a substrate20, comprises an integrated pumping system155having a high operating efficiency, small size, and low vibrational and noise levels. The apparatus115comprises a chamber, such as a load-lock chamber110, transfer chamber115, or process chamber120. An integrated pump165is abutting or adjacent to one of the chambers110, 115, 120for evacuating gas from the chambers. In operation, the pump is located within the actual envelope or footprint of the apparatus and has an inlet170connected to a chamber110, 115, 120, and an outlet175that exhausts the gas to atmospheric pressure. Preferably, the integrated pump165comprises a pre-vacuum pump or a low vacuum pump and is housed in a noise reducing enclosure having means for moving the pump between locations and means for stacking pumps vertically in use.

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PCT Search Report dated Nov. 26, 2004; Application No. 99310475.1-2203.

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